Education

Scientific publication

The leading research engineers of MERI JSC have hundreds of works published in Russian and foreign scientific journals including publications listed by Higher Attestation Commission of the Ministry of Science and Higher Education of the Russian Federation, RSCI (Russian Science Citation Index) journals, preprints of the Russian Academy of Sciences etc.
"Investigation of the features of integrating Non-volatile FRAM elements with CMOS technology"
  • 2017 г.
  • Authors: O.M. Orlov,D.D. Voronov, R.A. Islamov, G.Ja. Krasnikov
  • Журнал - Russian Microelektronics magazine, 2017, volume 46, No. 5, page 353-358
The Charge Trap Density Evolution in Wake-up and Fatigue Modes of FRAM
  • 2017 г.
  • Authors: D.R. Islamov, O.M. Orlov, V.A.Gritsenko, G.Ja. Krasnikov
  • Журнал - ECS Transactions,2017, vol.80, Iss.1, pp.279-281
«Leakage currents mechanism in thin films of ferroelectric Hf0,5Zr0,5O2»
  • 2017 г.
  • Authors: D.R. Islamov, A.G. Chernikova, A.M. Markeev, T.V. Perevalov, V.A.Gritsenko, O.M. Orlov,
  • 33rd International Conference on the Physics of Semiconductors, IOP Conf.Series: journal of Physics, conf.series 864 (2017)
«Trap Density Evolution in FRAM:fromWake-up to Fatigue»
  • 2017 г.
  • Authors: D.R. Islamov, O.M. Orlov, V.A.Gritsenko, G.Ja. Krasnikov
  • NGC 2017 conference in Tomsk (конференция по микро- и наноэлектронике, фотонике и возобновляемой энергии) 18-22.09.2017г.
The study of electrophysical characteristics of SOI MOSFETs in the temperature range from -60 to 250 ° С
  • 2017 г.
  • Authors: Бенедиктов А.С., Шелепин Н.А., Игнатов П.В., Ключников А.С.
«Thick benzocyclobutene (BCB) films processing procedures for contaminations free pattern formation»
  • 2017 г.
  • Authors: G.Y. Krasnikov, O.P. Gushin, P.I. Kuznetcov, K.S. Esenkin
  • Тезисы доклада на конференции «MNE 2017», г. Брага, с. 58
«Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas»
  • 2017 г.
  • Authors: A.Rezvanov, A.V. Miakonkikh, A.S. Vishnevskiy, K,V. Rudenko, M.R. Baklanov
  • Журнал Journal of Vacuum Science & Technology B, volume 35, Issue 2, p. 021204-1 - 021204-6, 2017г.
«Pore surface grafting of porous low-k dielectrics by selective polymers»
  • 2017 г.
  • Authors: Тезисы конференции «MRS 2017 Spring Meeting&Exibit» April 17-21, Phoenix, Arizona
«Experimental study of plasma-induced damage in cryogenic etching of porous low-k dielectrics in CF3Br and CF4»
  • 2016 г.
  • Authors: A.Rezvanov, A.V. Miakonkikh, K.V. Rudenko, A.S. Vishnevsky, E.S. Gornev, M.R. Baklanov
  • Тезисы конференции «MRS 2017 Spring Meeting&Exibit» April 17-21, Phoenix, Arizona
Mechanism of charge transport of stress induced leakage current and trap nature in thermal oxide on silicon
  • 2016 г.
  • Authors: Damir R.Islamov, V. A. Gritsenko, T. V. Perevalov, O. M. Orlov, G.Ya. Krasnikov
  • 33 rd International conference on the Physics of Semiconductors, 2016.7.31-2016.8.5 , ICPS 2016, Beijing, China, Mo-P.020, c.86
Charge transport mechanism of stress induced leakage current in thermal silicon oxide
  • 2016 г.
  • Authors: D.R. Islamov, V.A. Gritsenko, T.V. Perevalov, O.M. Orlov, G.Ya. Krasnikov
  • Журнал ECS Transactions 75(5) 2016, 57-62
«Nature of traps responsible for the memory effect in silicon nitride»
  • 2016 г.
  • Authors: V. A. Gritsenko, T. V. Perevalov, O. M. Orlov, G. Ya. Krasnikov
  • Журнал - Applied physics letters 109, 062904 (2016) doi: 10. 1063/1.4959830 Стр. 1- 4
«The charge transport mechanism and electron trap nature in thermal oxide on silicon»
  • 2016 г.
  • Authors: Damir R.Islamov, Vladimir A. Gritsenko, Timofey V. Perevalov, Oleg M. Orlov, Gennady Ya. Krasnikov
  • Журнал - Applied physics letters 109, 052901 (2016) doi: 10. 1063/1.4960156. Стр. 1- 4