Molecular Electronics Research Institute and Scientific Research Institute of Precision Mechanics have started a joint development.

Scientific Research Institute of Precision Mechanics and Molecular Electronics Research Institute (both part of the Element Group of Companies, MOEX:ELMT) have begun the development of a cluster system for applying aluminum metallization layers using vacuum deposition. The equipment will allow the production of integrated circuits with 180–90 nm topological standards on 200 mm wafers. The cluster system is being created as part of an experimental design project with the support of the Ministry of Industry and Trade of Russia.
The development and manufacture of a cluster system for magnetron deposition of aluminum metallization layers is part of the comprehensive program «Development of Electronic Engineering until 2030».
An important feature of the new equipment will be a transport system consisting of two transport modules separated by a buffer chamber. This configuration will allow for the placement of up to eight technological modules and two wafer loading-unloading gates. Some of the modules are duplicated in order to have the ability to not stop production processes during the technological maintenance of one of the modules. This solution contributes to an increase in continuous operating time, which positively affects productivity and efficiency. Additionally, the modular design of the installation will allow replacing one or several modules by docking with the transport system. This provides the possibility of changing the equipment configuration or upgrading it to perform new tasks.
This is the first cluster system in Russia, which will consist of eight modules: four modules for pre-processing plates and four technological modules for magnetron deposition. The cluster complex will also include two robotic manipulators.
The cluster system will ensure the execution of processes for depositing films of aluminum, titanium, and titanium nitride. These layers are necessary for the production of microchips, in particular, for creating aluminum metallization with barrier and adhesion layers and hard masks/anti-reflective coatings for the photolithography process. To date, the potential consumers of the equipment are microelectronics manufacturers that have a technological line for producing chips based on 200 mm wafers.

During the execution of the experimental design work, specialists from Scientific Research Institute of Precision Mechanics will have to develop sketch and technical projects of the equipment, manufacture models of key units of the cluster complex, develop design documentation, and produce a prototype of the installation, including conducting preliminary tests to assess the compliance of the equipment with the parameters approved in the technical assignment.
Scientists and engineers from Molecular Electronics Research Institute will determine the technical requirements for the functional performance of technological equipment, develop test programs for the cluster, the physical structure of test wafers, and the recipes of technological operations for conducting tests, as well as carry out the entire set of technological tests of the cluster.
The development of the cluster complex for magnetron deposition of aluminum metallization layers is planned to be completed by the end of September 2030.
«The creation of a domestic cluster system for magnetron deposition of aluminum metallization layers, meeting current industry standards, will become an important component of the development of microelectronics in Russia. The development of cluster equipment with eight technological modules - this is a new challenge that requires solving a number of complex scientific and technical problems. Nevertheless, a team of highly qualified specialists has already been formed in Scientific Research Institute of Precision Mechanics, and professional competencies in the creation of cluster equipment have been developed, which allow us to contribute to the development of promising and industry-important equipment,» noted Mikhail Biryukov, the CEO of Scientific Research Institute of Precision Mechanics.
«We continue our extremely important work on the development of domestic electronic equipment. Last year, we completed the design and assembly of the first cluster systems in Russia for plasma-enhanced chemical vapor deposition (PECVD) and etching (PE) processes, laying the foundation for the development of a domestic production line. Now we are starting the development of a new installation that will work with 200 mm diameter wafers, and I am sure it will be in demand by enterprises both in Russia and abroad», emphasized the General Director of Molecular Electronics Research Institute - Alexander Kravtsov.

Company Information:
Element Group of Companies (MOEX:ELMT) is a leader in the production of domestic electronic components. The Group's products are used in key sectors of the Russian economy, including healthcare, energy, transport, oil and gas industry, aircraft and shipbuilding, as well as the space industry. The Group includes more than 30 design centers and production facilities. The Group manufactures over 3,000 product types. In May 2024, Element conducted an IPO. In January 2026, AFK Sistema, which owned 37.6% of the shares, completely exited the shareholders of Element, selling its stake to Sberbank.
JSC «Scientific Research Institute of Precision Mechanics», part of the Element Group of Companies, MOEX: ELMT) is a leading developer and manufacturer of a wide range of industrial and research technological equipment for the microelectronics industry. The institute was founded in 1962. It is engaged in the creation of plasma chemical etching, vapor phase deposition, physical deposition, epitaxial structure growth, and gas-thermal processing installations, as well as cluster complexes based on them for processing wafers up to 300 mm in diameter. It is an active participant in Integrated Projects and State programs of the Ministry of Industry and Trade of the Russian Federation. It is included in the register of organizations operating in the field of the radio-electronic industry.
JSC «Research Institute of Molecular Electronics» (part of the Element Group of Companies, MOEX: ELMT) is a leading research center conducting fundamental and applied research in the field of microelectronics, as well as the development and production of semiconductor products. It was founded in 1964. It carries out experimental design work under programs of the Ministry of Industry and Trade, the Ministry of Science and Higher Education, state corporations, and also conducts initiative work at its own expense. By the decree of the Government of the Russian Federation, it is designated as the organization responsible for implementing the priority area «Electronic Technologies». Resident of the special economic zone «Technopolis Moscow».