Russian Deputy Prime Minister Denis Manturov’s official visit to Molecular Electronics Research Institute and Scientific Research Institute of Precision Engineering

Denis Manturov, Deputy Prime Minister and Head of the Ministry of Industry and Trade, accompanied by Gennady Krasnikov, President of the Russian Academy of Sciences, General Director of MERI, paid a working visit to Molecular Electronics Research Institute (MERI) and Scientific Research Institute of Precision Engineering (NIITM).

Mikhail Biryukov, General Director of NIITM, demonstrated to the Deputy Prime Minister the special technological equipment for atomic layer deposition developed by the institute, as well as domestic plasma-chemical etching units for 180-90 nanometer topologies. At MERI, the Deputy Prime Minister was acquainted with the work of Russia's only physical and chemical analytical laboratory for conducting research in the field of quality control of technological media. Alexander Kravtsov, Deputy Director General and Chief Designer of MERI, noted «There are only a few such laboratories in the world, and no more than three in Europe. The laboratory is engaged in the certification of materials necessary for the organization of production in the microelectronics, pharmaceutical, chemical, biotechnology, and other industries, the compilation of technical requirements and recommendations for their use, and the development of unique certification methods».

During the visit, Denis Manturov was also shown the equipment and the process of mass production of domestic materials for microelectronics, which were developed as part of the Russian Ministry of Industry and Trade's R&D subsidy.

In the laboratory of advanced technological processes at MERI, the delegation examined the unique special technological equipment for atomic-layer deposition developed by NIITM, which is used in the creation of technology for the production of ferroelectric non-volatile memory. The laboratory conducts research and development of new microelectronics technologies, as well as the introduction of new materials into production.